US 2006/0038525 A1Published application

Prober and testing apparatus using same

AssigneeAgilent Technologies, Inc.

InventorAkito Kishida

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Abstract

A prober includes a frame having a frame ground terminal, a chuck stage, servo motors for driving the chuck stage, servo amplifiers connected to the servo motors, first floating mounts on which the servo amplifiers are provided, a second floating mount on which the servo motor is provided. The first floating mounts are electrically insulated from the frame and have first ground terminals connected to the ground terminals of the servo amplifiers. The second floating mount is electrically insulated from the frame and has a second ground terminal connected to the ground terminal of the servo motor. The prober further includes shielded cables connecting the servo amplifiers and the servo motors, a first wire connecting the first ground terminal and the frame ground terminal and also connecting the first ground terminal and the second floating mount, and second wires connecting the shielded cables and the frame ground terminal.

Claims15

Dependent claims

A prober comprising:

a frame having a frame ground terminal;
a chuck stage for placing a device under test;
at least one servo motor for driving the chuck stage, each servo motor having a ground terminal;
at least one servo amplifier connected to the servo motor, each servo amplifier having a ground terminal;
at least one first floating mount on which the at least one servo amplifier is provided, the first floating mount being electrically insulated from the frame and being provided with a first ground terminal that is connected to the ground terminal of the servo amplifier;
at least one second floating mount on which at least one of the at least one servo motor is provided, each second floating mount being electrically insulated from the frame and being provided with a second ground terminal that is connected to the ground terminal of each of the at least one servo motor;
a shielded cable that connects the servo amplifier and the servo motor;
a first wire that connects the first ground terminal and the frame ground terminal and that connects the first ground terminal and the second floating mount;
and
a second wire that connects the shielded cable and the frame ground terminal.

7 more elements

A prober comprising:

a frame having a frame ground terminal;
a chuck stage for placing a device under test;
at least one servo motor for driving the chuck stage, each servo motor having a ground terminal and a shaft with a first insulating member;
at least one servo amplifier connected to the servo motor, each servo amplifier having a ground terminal;
at least one first floating mount on which the at least one servo amplifier is provided, the first floating mount being electrically insulated from the frame and being provided with a first ground terminal that is connected to the ground terminal of the servo amplifier;
at least one second floating mount on which at least one of the at least one servo motor is provided, each second floating mount being electrically insulated from the frame and being provided with a second ground terminal that is connected to the ground terminal of each of the at least one servo motor;
a shielded cable that connects the servo amplifier and the servo motor;
a first wire that connects the first ground terminal and the frame ground terminal and that connects the second floating mount and the frame ground terminal;
and
a second wire that connects the shielded cable and the frame ground terminal.

7 more elements

Dependencies are inferred from the claim text.