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US 2006/0037994 A1Published application
Bonded silicon, components and a method of fabricating the same
AssigneeThermal Corp.
InventorC. Rogers
Life of this patent
Estimating the term…
Abstract
A heat pipe housing assembly (22) includes a pair of silicon housing pieces (24, 26) and a bond joint (42) between the housings (24, 26), with the bond joint (42) preferably including a eutectic layer (43).
Claims33
A method of fabricating a heat pipe housing made of silicon, the method comprising the steps of:
- providing a material that forms a eutectic with silicon at a temperature below the melting point of silicon;
- sandwiching a layer of the material between two silicon surfaces of two pieces of a heat pipe housing;
- and
- heating the sandwiched layer of the material and the two silicon surfaces to a temperature between the eutectic temperature and the melting point of silicon, and maintaining the sandwiched layer of material and the two silicon surfaces between the eutectic temperature and the melting point of silicon until the material and the silicon diffuse into each other to produce a bond joint between the two pieces.
1 more element
A method of fabricating a heat pipe housing made of silicon, the method comprising the steps of:
- sandwiching a layer of aluminum or aluminum-silicon alloy between two silicon surfaces of two pieces of a heat pipe housing;
- heating the sandwiched layer of aluminum and the two silicon surfaces to a temperature between a aluminum-silicon eutectic temperature and the melting point of silicon, and maintaining the sandwiched layer of material and the two silicon surfaces between the aluminum-silicon eutectic temperature and the melting point of silicon until the aluminum and the silicon diffuse into each other to produce a bond joint between the two pieces.
A method of fabricating a heat pipe housing made of silicon, the method comprising the steps of:
- sandwiching a layer of gold between two silicon surfaces of two pieces of a heat pipe housing;
- heating the sandwiched layer of gold and the two silicon surfaces to a temperature between a gold-silicon eutectic temperature and the melting point of silicon, and maintaining the sandwiched layer of material and the two silicon surfaces between the gold-silicon eutectic temperature and the melting point of silicon until the gold and the silicon diffuse into each other to produce a bond joint between the two pieces.
A heat pipe housing construction comprising:
- a first housing piece made of silicon;
- a second housing piece made of silicon;
- and
- a bond joint between the first and second housings, said bond joint comprising a silicon eutectic.
1 more element
A method of bonding a pair of silicon components, the method comprising the steps of:
- providing a material that forms a eutectic with silicon at a temperature below the melting point of silicon;
- sandwiching a layer of the material between two silicon surfaces of two silicon components, with a potassium fluoro aluminate flux between the layer and each of the two silicon surfaces;
- and
- heating the sandwiched layer of the material and the two silicon surfaces to a suitable elevated temperature for a sufficient amount of time to allow the material and the silicon to diffuse into each other to produce a bond joint between the two silicon components.
1 more element
Dependencies are inferred from the claim text.