Mass flow controller
OwnerMasami Nishikawa, Masao Yamaguchiinventors
Life of this patent
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Abstract
The invention presents a mass flow controller capable of supplying always stably at desired flow rate in spite of pressure fluctuations at either upstream side or downstream side of the mass flow controller. The invention is a mass flow controller having a flow rate control valve and a flow rate sensor, more specifically comprising a pressure control valve disposed at the upstream side of the flow rate control valve, a pressure sensor disposed between this pressure control valve and the flow rate control valve, and a controller for controlling the pressure control valve by feeding back the output of this pressure sensor.
Claims14
A mass flow controller, which has a flow rate control valve and a flow rate sensor, characterized by comprising a pressure control valve disposed at the upstream side of the flow rate control valve, a pressure sensor disposed between this pressure control valve and the flow rate control valve, and a controller for controlling the pressure control valve by feeding back the output of this pressure sensor.
A mass flow controller module that can control fluid flow and be installed as a unitary component, comprising:
- a housing block member having a fluid passageway, mounted on the housing block member from an upstream position is a pressure control valve unit, a flow rate sensor unit and a flow rate control valve unit;
- a pressure sensor unit operatively mounted in the fluid passageway;
- and
- a control unit operatively connected to the pressure control valve unit, the flow rate sensor unit, the flow rate control valve unit and the pressure sensor unit whereby the control unit can automatically set and maintain a constant flow rate despite changes in fluid pressure.
In a semiconductor production assembly utilizing a source of fluid, the improvement of a mass flow controller module that can control fluid flow and be installed as a unitary component, comprising:
- a housing block member having a fluid passageway connected to the source of fluid, mounted on the housing block member from an upstream position is a pressure control valve unit, a flow rate sensor unit and a flow rate control valve unit;
- a pressure sensor unit operatively mounted in the fluid passageway;
- and
- a control unit operatively connected to the pressure control valve unit, the flow rate sensor unit, the flow rate control valve unit and the pressure sensor unit whereby the control unit can automatically set and maintain a constant flow rate despite changes in fluid pressure.
Dependencies are inferred from the claim text.