Low temperature testing device for electronic components

Cold test device for electronic components, with a cryogenic fluid supply line (5) for supply of a liquid cryogenic fluid, an evaporator (9) for converting the liquid cryogenic fluid into a gaseous cryogenic fluid, a cryogenic fluid line (11) for transporting the gaseous cryogenic fluid to the electronic component (3) in order to cool the electronic component (3) with the gaseous cryogenic fluid, and with a heating means (14) for adjusting the temperature of the gaseous cryogenic fluid, characterized in that in the cryogenic fluid line (11) which transports the gaseous cryogenic fluid there is a volumetric flow regulator (13, 13′, 13″) which stabilizes the pressure and the volumetric flow of the cryogenic fluid.