US 2006/0037183 A1 · Method for manufacturing piezoelectric thin film resonator, piezoelectric thin film resonator, frequency filter; method for manufacturing oscillator, oscillator, electronic circuit, and electronic apparatus

Abstract

To provide a method for manufacturing a piezoelectric thin film resonator with excellent characteristics. A method for manufacturing a piezoelectric thin film resonator in accordance with the present invention includes a step of forming a laminated body by successively laminating, above a first substrate, a piezoelectric thin film and a first electrode, a step of bonding a second substrate and the laminated body, a step of separating the first substrate from the laminated body, a step of forming a second electrode above the piezoelectric thin film, and a step of patterning the second electrode, the piezoelectric thin film and the first electrode.

Claims18

Dependent claims

A method for manufacturing a piezoelectric thin film resonator, comprising:

a step of forming a laminated body by successively laminating, above a first substrate, a piezoelectric thin film and a first electrode;
a step of bonding a second substrate and the laminated body;
a step of separating the first substrate from the laminated body;
a step of forming a second electrode above the piezoelectric thin film;
and
a step of patterning the second electrode, the piezoelectric thin film and the first electrode.

3 more elements

Dependencies are inferred from the claim text.

Facts

Application

11/190,038Filed 26 Jul 2005

Priority

JP 2004-24232823 Aug 2004

Published

23 Feb 2006

Term ends

Not estimatedThe source records don’t support an estimate.

Classification12 codes

H10N 30/079
By depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing: using intermediate layers, e.g. for growth control
H03H 3/02
For the manufacture of electromechanical resonators or networks: for the manufacture of piezoelectric or electrostrictive resonators or networks
H03H 9/02031
Characteristics of piezoelectric layers, e.g. cutting angles: consisting of ceramic
H03H 9/0542
Constructional combinations of supports or holders with electromechanical or other electronic elements: consisting of a lateral arrangement

Method for manufacturing piezoelectric thin film resonator, piezoelectric thin film resonator, frequency filter; method for manufacturing oscillator, oscillator, electronic circuit, and electronic apparatus

Life of this patent

Method for manufacturing piezoelectric thin film resonator, piezoelectric thin film resonator, frequency filter; method for manufacturing oscillator, oscillator, electronic circuit, and electronic apparatus

Life of this patent

Abstract

Claims18