CMOS image sensor and method for fabricating the same
AssigneeDongbuAnam Semiconductor Inc.
InventorJun Mun
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Abstract
A complementary metal-oxide semiconductor (CMOS) image sensor and a method for fabricating the same are disclosed. The CMOS image sensor a plurality of photosensitive devices formed on a semiconductor substrate, an interlayer dielectric formed on the photosensitive devices, and a plurality of color filter layers facing into each interlayer dielectric and filtering light for each wavelength, a planarization layer formed on each of the color filter layers, and a micro-lens layer formed on the planarization layer and having a refractive index distribution, in which light is focused to the photosensitive device facing thereto, based on an ion injection profile.
Claims5
A complementary metal-oxide semiconductor image sensor, comprising:
- a plurality of photosensitive devices formed on a semiconductor substrate;
- an interlayer dielectric formed on the photosensitive devices, and a plurality of color filter layers facing into each interlayer dielectric and filtering light for each wavelength;
- a planarization layer formed on each of the color filter layers;
- and
- a micro-lens layer formed on the planarization layer and having a refractive index distribution, in which light is focused to the photosensitive device facing thereto, based on an ion injection profile.
A method of fabricating a complementary metal-oxide semiconductor image sensor, comprising:
- forming interlayer dielectrics on a plurality of photosensitive devices formed on a semiconductor substrate;
- forming a plurality of color filter layers on the interlayer dielectrics, each of the color filter layers facing into each photosensitive device;
- forming a planarization layer on the color filter layers;
- and
- depositing a lens-forming material layer on the planarization layer, and forming a micro-lens layer having a refractive index distribution, in which light is focused onto the photosensitive device facing thereto, by using an ion injection and dispersion process.
Dependencies are inferred from the claim text.