Deposition system and film thickness monitoring device thereof
AssigneeDelta Electronics, Inc.
InventorsShing-Dar Tang, Sean Chang
Life of this patent
Estimating the term…
Abstract
A deposition system and film thickness monitoring device thereof. The film thickness monitoring device for monitoring thickness of a thin film coated on an optical substrate includes a laser light source, a retro-reflector, and a light receiver. The laser light source and the retro-reflector are disposed on opposite sides of the optical substrate. First, a light beam is emitted by the laser light source and then passes through the thin film along a first path. Second, the light beam is reflected by the retro-reflector and then passes through the thin film again along a second path parallel to the first path. Third, the light beam is received by the light receiver.
Claims20
A device for monitoring thickness of a thin film coated on an optical substrate, , comprising:
- at least one light source, emitting a light beam passing through the thin film along a first path;
- at least one retro-reflector for reflecting the light beam such that the light beam passes through the thin film along a second path parallel to the first path;
- and
- at least one light receiver for receiving the light beam passing through the thin film along the second light path.
A deposition system, comprising:
- at least one film deposition source providing at least one material for optical deposition;
- at least one carrier for supporting an optical substrate to deposit a thin film thereon;
- at least one light source emitting a light beam, passing through the thin film along a first path;
- at least one retro-reflector for reflecting the light beam to pass through the thin film along a second path parallel to the first path;
- and
- at least one light receiver, receiving the light beam passing through the thin film along the second light path.
Dependencies are inferred from the claim text.