X-ray detector
AssigneeKabushiki Kaisha Toshiba
InventorsKeiichi Ito, Hiroshi Aida, Eiji Oyaizu, Yukihiro Fukuta, Akihisa Saito, Akiko Fujisawa, Katsuhisa Homma
Life of this patent
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Abstract
An X-ray detector comprising a scintillation layer separated by a partition for each pixel and a photodiode for converting fluorescent light, which is converted by the sciltillation layer, into a signal charge, wherein when an average particle diameter of phosphor particles forming the scintillation layer is Ds and an average particle diameter forming the partition is Dw, Ds>Dw is satisfied.
Claims20
An X-ray detector, comprising:
- a photoelectric converting section of a pixel unit,
- scintillator pixels containing a fluorescent material I formed on individual pixels of the photoelectric converting section, and
- a partition containing a fluorescent material and/or a nonfluorescent material disposed between the scintillator pixels,
- wherein, when an average particle diameter of the fluorescent material I is Ds and an average particle diameter of the fluorescent material and/or the nonfluorescent material is Dw, Ds>Dw is satisfied.
A method for producing an X-ray detector comprising a photoelectric converting section of a pixel unit, scintillator pixels containing a fluorescent material I formed on individual pixels of the photoelectric converting section, and a partition containing a fluorescent material and/or a nonfluorescent material disposed between the scintillator pixels, wherein, when an average particle diameter of the fluorescent material I is Ds and an average particle diameter of the fluorescent material and/or the nonfluorescent material is Dw, Ds>Dw is satisfied, the method comprising:
- forming a layer containing the fluorescent material I on the photoelectric converting section of the pixel unit;
- forming the scintillator pix els by removing a portion from the layer;
- and
- forming the partition by filling a material containing a fluorescent material II and/or a fluorescent material III into the portion removed.
A method for producing an X-ray detector comprising a photoelectric converting section of a pixel unit, scintillator pixels containing a fluorescent material I formed on individual pixels of the photoelectric converting section, and a partition containing a fluorescent material and/or a nonfluorescent material disposed between the scintillator pixels, wherein, when an average particle diameter of the fluorescent material I is Ds and an average particle diameter of the fluorescent material and/or the nonfluorescent material is Dw, Ds>Dw is satisfied, the method comprising:
- forming a layer containing a fluorescent material II and/or a fluorescent material III on the photoelectric converting section of the pixel unit;
- removing a portion from the layer;
- and
- forming the scintillator pixels by filling the portion removed with a material containing the fluorescent material I.
A method for producing an X-ray detector comprising a photoelectric converting section of a pixel unit, scintillator pixels containing a fluorescent material I formed on individual pixels of the photoelectric converting section, and a partition containing a fluorescent material and/or a nonfluorescent material disposed between the scintillator pixels, wherein, when an average particle diameter of the fluorescent material I is Ds and an average particle diameter of the fluorescent material and/or the nonfluorescent material is Dw, Ds>Dw is satisfied, the method comprising:
- forming a layer of an organic material or an inorganic material on the photoelectric converting section of the pixel unit;
- forming a temporary pixel of the organic material or the inorganic material by removing a portion from the layer;
- forming the partition by filling the portion removed with a material containing the fluorescent material II and/or the fluorescent material III;
- removing the temporary pixel;
- and
- forming the scintillator pixels by filling the removed pixels with a material containing the fluorescent material I.
A method for producing an X-ray detector comprising a photoelectric converting section of a pixel unit, scintillator pixels containing a fluorescent material I formed on individual pixels of the photoelectric converting section, and a partition containing a fluorescent material and/or a nonfluorescent material disposed between the scintillator pixels, wherein, when an average particle diameter of the fluorescent material I is Ds and an average particle diameter of the fluorescent material and/or the nonfluorescent material is Dw, Ds>Dw is satisfied, the method comprising:
- forming a layer of an organic material or an inorganic material on the photoelectric converting section of the pixel unit;
- forming a temporary partition of the organic material or the inorganic material by removing a portion from the layer;
- forming the scintillator pixels by filling the portion removed with a material containing the fluorescent material I;
- removing the temporary partition;
- and
- forming the partition by filling the removed temporary partition with a material containing a fluorescent material II and/or a fluorescent material III.
Dependencies are inferred from the claim text.