Infrared heating element and a substrate type vacuum chamber, particularly for vacuum coating facilities
OwnerDieter Haasinventor
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Abstract
The present invention relates to an infrared heating element and a substrate heater type vacuum chamber, particularly for vacuum coating facilities. The infrared heating element comprises a heating source which is surrounded by a protective means designed as a tubular metal jacket. The tubular metal jacket is provided at least to an extent with an infrared-emitting layer. The vacuum chamber comprises a substrate and at least one heating element that is designed as an infrared heating element, the substrate and infrared heating element being thermally decoupled in such a way that only thermal radiation contributes toward heating.
Claims32
An infrared heating element for heating a substrate in a vacuum chamber, said infrared heating element comprising:
- a heating source;
- and
- a protective means, said protective means being designed as a tubular metal jacket;
- wherein said tubular metal jacket sheathes said heating source and includes at least a partial infrared-emitting layer.
A substrate heater type vacuum chamber for vacuum coating facilities, comprising:
- a substrate;
- and
- at least one infrared heating element positioned adjacent to said substrate, said infrared heating element comprising a heating source and a protective means, said protective means being designed as a tubular metal jacket, wherein said tubular metal jacket sheathes said heating source and includes at least a partial infrared-emitting layer;
- wherein said infrared heating element is thermally decoupled from said substrate such that thermal conduction and thermal convection between said substrate and said infrared heating element are substantially prohibited.
A substrate heater type vacuum chamber for vacuum coating facilities, comprising:
- a substrate;
- and
- at least one infrared heating element positioned adjacent to said substrate, said infrared heating element being thermally decoupled from said substrate such that thermal conduction and thermal convection between said substrate and said infrared heating element are substantially prohibited;
- wherein said infrared heating element comprises a heating source and a protective means, said protective means being designed as a tubular metal jacket, wherein said tubular metal jacket sheathes said heating source and includes at least a partial infrared-emitting layer, and wherein said heating source is designed as a heating wire of a resistance heater and said tubular metal jacket is constructed of a metal having an emittance of between 0.1 to 0.4 and said infrared-emitting layer has an emittance of more than 0.7, and wherein said infrared-emitting layer comprises a metal oxide layer.
Dependencies are inferred from the claim text.