Forming features in printhead components
OwnerKee Tan, Ping Zhan +2inventors
InventorsKee Tan, Ping Zhan, Jiansan Sun, Jianhui Gu
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Abstract
The present invention provides a method of forming a feature in a printhead component. Femtosecond laser beam pulses are scanned over a target zone of a printhead substrate to remove a layer of the printhead substrate. The scanning is repeated until a depth of printhead substrate has been removed from the target zone which corresponds to a desired feature depth. The removed portion of the printhead substrate forms at least part of the feature in the printhead component.
Claims12
A method of forming a feature in a printhead component comprising:
- scanning femtosecond laser beam pulses over a target zone to remove a layer of printhead substrate;
- and
- repeating the scanning step until a depth of printhead substrate has been removed from the target zone which corresponds to a desired feature depth;
- wherein the removed portion of the printhead substrate forms at least part of the feature in the printhead component.
A system for forming a feature in a printhead component, comprising:
- a femtosecond laser beam source;
- a beam scanner, programmable with one or more desired attributes of the feature;
- and
- a printhead component alignment device to align the printhead component with the femtosecond laser beam according to the desired attributes of the feature;
- wherein the feature is formed by scanning femtosecond laser beam pulses over a printhead substrate to sequentially remove layers of the printhead substrate according to the desired attributes of the feature;
- and
- wherein the removed portion of the printhead substrate forms the feature in the printhead component.
Dependencies are inferred from the claim text.