Method and system for idle state operation

A process for electrochemically treating a surface of a plurality of microfeature workpieces in an electrochemical treating chamber that includes a processing unit separated from an electrode unit by a semi-permeable membrane, the process comprising:

• contacting the semi-permeable membrane with a first processing fluid;
• contacting the semi-permeable membrane with a second processing fluid;
• contacting the surface of a first microfeature workpiece with the first processing fluid;
• applying an electric potential between the surface of the first microfeature workpiece and an electrode in contact with the second processing fluid;
• removing the electric potential between the surface of the first microfeature workpiece and the electrode;
• separating the first processing fluid or the second processing fluid from the semi-permeable membrane;
• causing the first processing fluid or the second processing fluid separated from the semi-permeable membrane to come back into contact with the semi-permeable membrane;
• contacting the surface of a second microfeature workpiece with the first processing fluid;
• and
• applying an electric potential between the surface of the second microfeature workpiece and the electrode in contact with the second processing fluid.

A system for electrochemically treating a microfeature workpiece comprising:

• a chamber including:
• a processing unit for receiving a first processing fluid;
• an electrode unit for receiving a second processing fluid;
• an ion-permeable barrier between the processing unit and the electrode unit;
• a first processing fluid circulation system;
• a second processing fluid circulation system;
• and
• a flow control system controlling the first processing fluid circulation system or the second processing fluid circulation system to cause processing fluid to separate from the barrier during an idle stage between a first electrochemical treatment stage and a second electrochemical treatment stage.