Apparatus and method for depositing a material on a substrate
AssigneeFirst Solar, Inc.
InventorJames Nolan
Life of this patent
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Abstract
Apparatus and a method for depositing a material on a substrate utilizes a distributor including a permeable member through which a carrier gas and a material are passed to provide a vapor that is deposited on a conveyed substrate. A secondary gas can be provided to promote uniform distribution of the material on the substrate.
Claims74
An apparatus for depositing a material on a substrate, comprising:
- a permeable member configured to be heated to a delivery temperature;
- a material supply conduit connected to the permeable member for supplying a carrier gas and a material to the permeable member;
- a secondary gas supply having at least one orifice internal to the permeable member configured to supply a secondary gas to the permeable member;
- and
- a conveyor configured to convey a substrate adjacent the permeable member.
An apparatus for depositing a material on a substrate, comprising:
- a distributor including:
- a permeable member having an elongated shape having opposite ends configured to be heated to a delivery temperature and to provide a vapor that passes outwardly through the permeable member;
- and
- a secondary gas supply internal to the permeable member for supplying a secondary gas;
- a pair of material supply conduits for introducing a carrier gas and a powder of a material into the opposite ends of the permeable member;
- a shroud at least partially surrounding the permeable member, the shroud having an opening formed as a slit along the length of the permeable member;
- and
- a conveyor configured to convey a substrate below the distributor.
A distributor for depositing a material on a substrate, comprising:
- a permeable member configured to be heated to a delivery temperature;
- and
- a secondary gas supply having at least one orifice internal to the permeable member configured to supply a secondary gas to the permeable member.
A method for depositing a material on a substrate, comprising:
- heating a permeable member;
- passing a carrier gas and a material into the permeable member for heating to provide a vapor via a material supply conduit;
- passing a secondary gas into the heated permeable member via a gas supply;
- and
- conveying a substrate adjacent the permeable member for depositing the vapor as a layer of the material on the substrate.
A method for depositing a material on a substrate, comprising:
- heating a permeable member;
- altering flow of a vapor of a material to be deposited within the permeable member to provide substantially uniform distribution exiting the permeable member;
- and
- conveying a glass sheet substrate adjacent the permeable member for deposition of the vapor on the substrate as a layer.
Dependencies are inferred from the claim text.