An apparatus for rapid x-ray structural analysis of ultra-fine structures which comprises an incident angle changing mechanism that controls the angle a sample's surface forms with an incident x-ray, a table that adjusts the height of that mechanism, a table for adjusting the height of the sample, a two-dimensional detector, a support of the two-dimensional detector, and a sample holder, said two-dimensional detector being installed in a cylinder of which center axis passes through the sample position and which can be installed to the vertical position or horizontal position. The detector can be installed at any angular position within the range of 360 degrees about the axis of the cylindrical holder. The camera length as specified by the distance between the sample and the two-dimensional detector can be changed by using cylinders of different inside diameters, wherein the two-dimensional detector may be used at any position if it is of a planar type, with optional addition of a mechanism for effecting rotation about the normal to the sample surface and a cross sample transportation table, wherein sample size that can be measured ranges from 3 mm long, 3 mm wide and 0.05 mm thick to 120 mm long, 120 mm wide and 20 mm thick, the sample mass that can be measured is up to 5 kg, the camera length that can be adopted ranges from 50 mm to 250 mm, the incident angle changing mechanism permits angular adjustment within ±5 degrees including the critical angle for total external reflection of x-rays from the sample, and wherein the sample height adjusting table is capable of intercepting the incident x-ray beam at half its height by the sample placed on the horizontal.