Solid-state rotational rate sensor device and method
AssigneeTriad Sensors, Inc.
InventorPeter Schiller
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Abstract
The present invention provides a solid-state rotational rate sensor device formed by a thin-film for generating an electrical voltage output proportional to the rate of rotational motion. The precision thin-film piezoelectric elements are configured and arranged on a semi-rigid structure to detect rotation (such as pitch, roll, and yaw) while rejecting spurious noise created by vibration, thermal gradients, and electromagnetic interference.
Claims5
1-14. (canceled)
A method of sensing a rotational rate of a solid-state device formed by a plurality of thin-film piezoelectric elements having a first set of piezoelectric elements, a second set of piezoelectric elements, and a third set of piezoelectric elements, comprising the steps of:
- actuating the first set of piezoelectric elements by a first electrical signal;
- and
- sensing rotational rate by the second and third sets of piezoelectric elements while rejecting spurious noise.
18-20. (canceled)
Dependencies are inferred from the claim text.