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US 2006/0032306 A1Published application
Micro-gyrometer with frequency detection
AssigneeCommissariat a l'Energie Atomique
InventorPhilippe Robert
Life of this patent
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Abstract
This invention suggests a micro-gyrometer, advantageously machined using conventional micro-electronic techniques, based on the detection of Coriolis forces generated by an angular movement Ω perpendicular to the direction of vibration of the masses free to move along the plane of the gyrometer. Coriolis forces are detected through the movement that they apply to the natural mode of a resonator coupled to the moving device.
Claims20
Gyrometer comprising:
- a first excitation resonator, free to move in a plane, comprising two masses connected to each other by connecting means;
- excitation means for putting masses into movement in a first direction of the plane;
- at least one second detection resonator connected to the first resonator;
- means of exciting the second resonator and measuring the frequency of its natural mode.
1 more element
Dependencies are inferred from the claim text.