Software synchronization of multiple scanning probes
AssigneeMultiprobe, Inc.
InventorsCasey Hare, Andrew Erickson
Life of this patent
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Abstract
A method and apparatus for scanning multiple scanning probe microscopes in close proximity, to scan overlapping scan areas at the same time while avoiding collision employs a control system providing drive signals to a first Atomic Force Microscope (AFM) and calculated drive signals to additional AFMs based on the first drive signals and the relative position of the additional AFMs to the first AFM for consistent spaced motion. Scanning and Failure Analysis (FA) probing of multiple feature of interest using multiple APMs allows for reduced time for locating FA features to set up measurements.
Claims15
A scanning probe microscopy system comprising:
- at least two scanning probes, each probe supported by cantilever to an atomic force microscope (AFM) having a special reference frame;
- means for generating a motion control signal for a first one of the AFMs;
- means for determining an offset motion control signal for a second one of the AFMs said offset motion control signal responsive to the first motion control signal and the special reference frames of the first one of the AFMs and the second one of the AFMs for non-interfering scanning of a probe supported by the second one of the AFMS to a probe supported by the first one of the AFMs;
- control means in the first one of the AFMs adapted to receive the motion control signal;
- and,
- control means in the second one of the AFMs adapted to receive the offset motion control signal.
A scanning probe microscopy system comprising:
- at least two scanning probes, each probe supported by cantilever to an atomic force microscope (AFM) having a special reference frame;
- means for controlling motion for a first one of the AFMs;
- means for controlling motion for a second one of the AFMs responsive to the special reference frames of the first one of the AFMs and the second one of the AFMs for non-interfering scanning of a probe supported by the second one of the AFMS to a probe supported by the first one of the AFMs.
A method for controlling multiple scanning probes comprising the steps of:
- providing a first probe mounted to an a first AFM;
- providing a second probe mounted to a second AFM;
- providing for the first probe a scan size;
- providing for the first probe a scan resolution;
- providing for the first probe a scan offset;
- generating a drive waveform for the first probe based on the scan size, scan resolution and scan offset;
- transforming the drive waveform to a spatial reference frame of the second AFM head using a special reference angle unique to the second AFM head and associated probe to provide a second drive waveform;
- applying the drive waveform to the first AFM and the second drive waveform to the second AFM substantially simultaneously.
Dependencies are inferred from the claim text.