Method and system for electron density measurement
AssigneeTokyo Electron Limited
InventorsEric Strang, Richard Parsons, Jody Goldfield
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AssigneeTokyo Electron Limited
InventorsEric Strang, Richard Parsons, Jody Goldfield
Estimating the term…
The present invention provides a diagnostic system for plasma processing, wherein the diagnostic system comprises a multi-modal resonator, a power source, a detector, and a controller. The controller is coupled to the power source and the detector and it is configured to provide a man-machine interface for performing several monitoring and controlling functions associated with the diagnostic system including: a Gunn diode voltage monitor, a Gunn diode current monitor, a varactor diode voltage monitor, a detector voltage monitor, a varactor voltage control, a varactor voltage sweep control, a resonance lock-on control, a graphical user control, and an electron density monitor. The diagnostic system can further provide a remote controller coupled to the controller and configured to provide a remote man-machine interface. The remote man-machine interface. The remote man-machine interface can provide a graphical user interface in order to permit remote control of the diagnostic system by an operator. In addition, the present invention provides several methods of controlling the diagnostic system in order to perform both monitor and control functions.
A diagnostic system for plasma processing, said diagnostic system comprising:
A method of controlling a diagnostic system, said diagnostic system comprising a multi-modal resonator to produce a cavity resonance, a power source to produce an output frequency, a detector to produce a transmission signal, and a controller coupled to said power source and said detector, said method comprising:
A method of controlling a diagnostic system, said diagnostic system comprising a multi-modal resonator to produce a cavity resonance, a power source to produce an output frequency, a detector to produce a transmission signal, and a controller coupled to said power source and said detector, said method comprising:
A method of controlling a diagnostic system, said diagnostic system comprising a multi-modal resonator to produce a cavity resonance, a power source to produce an output frequency, a detector to produce a transmission signal, and a controller coupled to said power source and said detector and configured to provide a lock-on circuit for receiving said transmission signal from said detector and locking said output frequency of said power source to said cavity resonance of said multi-modal resonator, said method comprising:
A method of controlling a diagnostic system, said diagnostic system comprising a multi-modal resonator to produce a cavity resonance, a power source to produce an output frequency, a detector to produce a transmission signal, a controller coupled to said power source and said detector, and a remote controller coupled to said controller and configured to provide a remote man-machine interface, said method comprising:
A method of controlling a diagnostic system, said diagnostic system comprising a multi-modal resonator to produce a cavity resonance, a power source to produce an output frequency, a detector to produce a transmission signal, a controller coupled to said power source and said detector and configured to provide a lock-on circuit for receiving said transmission signal from said detector and locking said output frequency of said power source to said cavity resonance of said multi-modal resonator, and a remote controller coupled to said controller and configured to provide a remote man-machine interface, said method comprising:
Dependencies are inferred from the claim text.