Circuit device manufacturing method
AssigneeSanyo Electric Co., Ltd.
InventorsRyosuke Usui, Hideki Mizuhara, Yusuke Igarashi, Noriaki Sakamoto
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AssigneeSanyo Electric Co., Ltd.
InventorsRyosuke Usui, Hideki Mizuhara, Yusuke Igarashi, Noriaki Sakamoto
Estimating the term…
A circuit device manufacturing method is provided, wherein the adhesion of an overcoat resin, formed on a conductive wiring layer, to a sealing resin layer is improved by irradiating plasma onto the overcoat resin. A first conductive film 23A and a second conductive film 23B, which are laminated with an interlayer insulating layer 22 interposed in between, are formed. By selectively removing the first conductive film, a first conductive wiring layer 12A is formed and the first conductive wiring layer is covered with an overcoat resin 18. Overcoat resin 18 is irradiated with plasma to roughen its top surface. A sealing resin layer 17 is formed so as to cover the top surface of the roughened overcoat resin 18 and circuit elements 13.
1-13. (canceled)
A circuit device manufacturing method comprising:
A circuit device comprising
A circuit device comprising
Dependencies are inferred from the claim text.