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US 2006/0019504 A1Published application
Forming a plurality of thin-film devices
AssigneeHewlett-Packard Development Company, L.P.
InventorCarl Taussig
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Abstract
An aspect of the present invention is a method for forming a plurality of thin-film devices. The method includes coarsely patterning at least one thin-film material on a flexible substrate and forming a plurality of thin-film elements on the flexible substrate with a self-aligned imprint lithography (SAIL) process.
Claims38
A method of forming a plurality of thin-film elements comprising:
- coarsely patterning at least one thin-film material on a flexible substrate;
- and
- forming a plurality of thin-film elements on the flexible substrate with a self-aligned imprint lithography (SAIL) process.
A system for forming a plurality of thin-film elements comprising:
- means for coarsely patterning at least one thin-film on a flexible substrate;
- means for forming the plurality of thin-film elements with a SAIL process.
A structure comprising:
- a coarsely patterned plurality of materials on a flexible substrate;
- and
- a plurality of electrically isolated elements in contact with the flexible substrate.
A method of forming a plurality of thin-film elements comprising:
- patterning at least one thin-film material on a flexible substrate in a coarse fashion;
- and
- depositing at least one material over the flexible substrate;
- forming a 3D structure over the at least one material wherein the 3D structure comprises 4 discrete vertical heights;
- and
- patterning the at least one material in accordance the desired characteristics of the plurality of thin-film elements.
3 more elements
Dependencies are inferred from the claim text.