Novel architecture to monitor isolation integrity between floating gate and source line
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChang-Jen Hsieh, Hung-Cheng Sung, Te-Hsun Hsu
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Abstract
A new method to form a floating gate isolation test structure in the manufacture of a memory device is achieved. The method comprises providing a substrate. A gate oxide layer is formed overlying the substrate. A floating gate conductor layer is deposited overlying the gate oxide layer. The floating gate conductor layer is patterned to expose the substrate for planned source regions. Ions are implanted into the exposed substrate to form the source regions. Contacting structures are formed to the source regions. Contacting structures are formed to the floating gate conductor layer.
Claims18
A method to form a floating gate isolation test structure in themanufacturo of a memory device, said method comprising:
- providing a substrate;
- forming a gate oxide layer overlying said substrate;
- depositing a floating gate conductor layer overlying said gate oxide layer;
- patterning said floating gate conductor layer to expose said substrate for planned source regions;
- implanting ions into said exposed substrate to form said source regions;
- forming contacting structures to said source regions;
- and
- forming contacting structures to said floating gate conductor layer.
A method to test isolation surrounding said floating gate conductor layer, said method comprising:
- providing a floating gate isolation test structure comprising:
- a substrate;
- a gate oxide layer overlying said substrate;
- a floating gate conductor layer overlying said gate oxide layer;
- source regions in said substrate;
- contacting structures to said source regions;
- and
- contacting structures to said floating gate conductor layer;
- forcing a voltage between said floating gate conductor layer and a second region;
- and
- measuring current through said floating gate conductor layer.
18-20. (canceled)
Dependencies are inferred from the claim text.