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US 2005/0239232 A1Published application
Manufacturing method for organic electronic element and manufacturing apparatus therefor
AssigneeCanon Kabushiki Kaisha
InventorsHiroshi Sugai, Masahiro Kanai
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Abstract
Provided are a method of effectively manufacturing an organic EL element with high quality and an apparatus therefor. A surface to be processed of a substrate in an upper electrode forming step is held downward, and the surface to be processed of the substrate in a passivation layer forming step is held upward.
Claims18
A manufacturing method for an organic electronic element, comprising the steps of:
- forming an organic conductive layer on a lower electrode arranged on a substrate;
- forming an upper electrode after the organic conductive layer forming step;
- and
- forming a passivation layer after the upper electrode forming step,
- wherein a surface to be processed of the substrate in the upper electrode forming step is held downward;
- and
- the surface to be processed of the substrate in the passivation layer forming step is held upward.
4 more elements
A manufacturing apparatus of an organic electronic element, comprising:
- means for forming an organic conductive layer on a lower electrode arranged on a substrate;
- means for forming an upper electrode;
- and
- means for forming a passivation layer,
- wherein the upper electrode forming means comprises means for holding a surface to be processed of the substrate downward;
- and
- the passivation layer forming means comprises means for holding the surface to be processed of the substrate upward.
4 more elements
Dependencies are inferred from the claim text.