Photosensitive composition, compound used in the same, and patterning method using the same
AssigneeFuji Photo Film Co., Ltd.
InventorKunihiko Kodama
Life of this patent
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Abstract
A photosensitive composition, comprises (A) a sulfonium salt represented by formula (I); wherein Y1, Y2 and Y3 each independently represents a nitrogen-containing heteroaryl group, an alkyl group, a cycloalkyl group, an aryl group or an alkenyl group, at least one of Y1, Y2 and Y3 represents a nitrogen-containing heteroaryl group, and at least two of Y1, Y2 and Y3 may combine with each other to form a ring; Xn− represents an n-valent non-nucleophilic anion; and n represents an integer of 1 to 3.
Claims21
A photosensitive composition, comprising
- (A) a sulfonium salt represented by formula (I);
- wherein Y1, Y2 and Y3 each independently represents a nitrogen-containing heteroaryl group, an alkyl group, a cycloalkyl group, an aryl group or an alkenyl group, at least one of Y1, Y2 and Y3 represents a nitrogen-containing heteroaryl group, and at least two of Y1, Y2 and Y3 may combine with each other to form a ring;
- Xn− represents an n-valent non-nucleophilic anion;
- and n represents an integer of 1 to 3.
A compound (A), represented by formula (I);
- wherein Y1, Y2 and Y3 each independently represents a nitrogen-containing heteroaryl group, an alkyl group, a cycloalkyl group, an aryl group or an alkenyl group, at least one of Y1, Y2 and Y3 represents a nitrogen-containing heteroaryl group, and at least two of Y1, Y2 and Y3 may combine with each other to form a ring;
- Xn− represents an n-valent non-nucleophilic anion;
- and n represents an integer of 1 to 3.
A compound (A), represented by formula (ID) or (IE);
- wherein Ra1 represents a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group or an acyl group;
- Ra2 and Ra3 each independently represents an alkyl group, a cycloalkyl group, an aryl group or an alkenyl group, and Ra2 and Ra3 may combine with each other to form a ring;
- Ra4, or each of Ra4's when m is a plural number, independently represents an organic group;
- X1− represents a univalent non-nucleophilic anion;
- X22− represents a divalent non-nucleophilic anion;
- and m represents an integer of 0 to 3.
Dependencies are inferred from the claim text.