Method of removing tar-forming gases from CVD/CVI furnace effluent
AssigneeHoneywell International Inc.
InventorsTerence Walker, Craig Shumaker
Life of this patent
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Abstract
Method for removing tar-forming hydrocarbons from an effluent gas mixtures from Chemical Vapor Deposition or Chemical Vapor Infiltration processes. Method includes passing at elevated temperature effluent gas mixture containing hydrogen, methane, and high molecular weight hydrocarbons through a bed that contains iron pellets, thereby decomposing tar-forming high molecular weight hydrocarbons in the effluent gas mixture. Apparatus including a de-tarring vessel (5) having a packed bed (7, 8, 9) of iron or iron oxide pellets (1) resting over a perforated distributor plate (2) and having an exhaust port (12), said de-tarring vessel being operatively linked via an exhaust port (6) to a CVI or CVD reactor vessel.
Claims19
A process for removing tar-forming hydrocarbons from an effluent gas mixture which comprises the step of passing at an elevated temperature an effluent gas mixture containing hydrogen, methane, and high molecular weight hydrocarbons, wherein said gas mixture is an effluent from a Chemical Vapor Deposition process or from a Chemical Vapor Infiltration process, through a first bed that contains iron pellets, thereby decomposing tar-forming high molecular weight hydrocarbons in said gas mixture.
An apparatus for de-tarring effluent gases from a Chemical Vapor Deposition or Chemical Vapor Infiltration process, said apparatus comprising
- a de-tarring vessel comprising a packed bed of iron or iron oxide pellets resting over a perforated distributor plate and having an exhaust port, said de-tarring vessel being operatively linked via an exhaust port to a CVI or CVD reactor vessel.
A method of fueling a gas turbine which comprises the steps of:
- carrying out a CVD or CVI process;
- directing effluent gas from said process through an iron oxide pellet bed, wherein said effluent gas is passed through said bed at an elevated temperature and wherein a portion of the iron in said pellets is converted into iron carbide;
- leading a gas mixture which has passed through said bed into a fuel supply inlet of a gas turbine.
A process for the production of iron carbide which comprises the step of passing a CVD/CVI effluent gas mixture containing hydrogen, methane, and high molecular weight hydrocarbons through a bed that contains iron pellets at an elevated temperature in order to convert a portion of the iron in said pellets into iron carbide while removing tar-forming high molecular weight hydrocarbons from said gas mixture.
Dependencies are inferred from the claim text.