Flexible tank and a chemical liquid supply apparatus using the same
AssigneeKoganei Corporation
InventorTakeo Yajima
Life of this patent
Estimating the term…
Abstract
A flexible tank has a volume-variable chamber formed so as to be sectioned by a flexible tube that is expanded or contracted in accordance with the amount of the contained chemical liquid, and adaptor parts attached to the flexible tube. A primary-side port open to the volume-variable chamber is open into one of the adaptor parts, and a secondary-side port open to the volume-variable chamber is open into the other adaptor part. The contact between the chemical liquid and air in the volume-variable chamber is suppressed to minimum level, thereby containing the chemical liquid without deteriorating the cleanliness of the chemical liquid, and improving discharge accuracy of the chemical liquid.
Claims10
A flexible tank comprising:
- a volume-variable chamber formed so as to be sectioned by a flexible membrane which is expanded and contracted in accordance with the amount of a contained chemical, and an adaptor part in which the flexible membrane is attached;
- and
- a primary-side port and a secondary-side port formed in the adaptor part so as to be open to the volume-variable chamber.
A chemical liquid supply apparatus having a chemical liquid bottle containing a chemical liquid, and a pump for sucking in the chemical liquid contained in the chemical liquid bottle and supplying the chemical liquid to an application nozzle;
- the chemical liquid supply apparatus comprising:
- a buffer tank chamber that being expanded in accordance with the amount of the chemical liquid supplied from the chemical liquid bottle by compression transport, and being contracted in accordance with the amount of the chemical liquid sucked in by the pump, and
- a pressure chamber containing the buffer tank chamber and communicated with inside and outside via an atmospheric-air open port;
- wherein
- the volume of the buffer tank chamber is kept constant in a state in which the atmospheric-air open port is closed, and the buffer tank chamber is expanded or contracted in accordance with the amount of the contained chemical liquid in a state in which the atmospheric-air open port is open.
A chemical liquid supply apparatus having a chemical liquid bottle containing a chemical liquid, a primary-side pump for sucking in the chemical liquid contained in the chemical liquid bottle, a filter for filtrating the chemical liquid sucked-in by the primary-side pump, and a secondary-side pump for supplying the chemical liquid filtrated through the filter to an application nozzle;
- the chemical liquid supply apparatus comprising:
- an adaptor part in which a primary-side port connected to the primary-side pump and a secondary-side port connected to the secondary-side pump are formed;
- and
- a flexible tank attached to the adaptor part and comprising a flexible tube being expanded in accordance with the amount of the chemical liquid flown in from the primary-side port, and being contracted in accordance with the amount of the chemical liquid flown out from the secondary-side port.
Dependencies are inferred from the claim text.