Manufacturing method of thin-film magnetic head, thin-film magnetic head, head gimbal assembly with thin-film magnetic head, and magnetic disk apparatus with head gimbal assembly
AssigneeSAE Magnetics (H.K.) Ltd.
InventorKunihiro Ueda
Life of this patent
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Abstract
A manufacturing method of a thin-film magnetic head included a step of cutting a wafer on which a large number of thin-film magnetic head elements are formed into rowbars each of which has a plurality of aligned thin-film magnetic head elements, a step of cleaning, by an ion beam etching method, a surface of each of the cut rowbars, which is to be opposed to a magnetic recording medium, a step of depositing a protection film on the cleaned surface of the rowbar, and a step of separating thereafter the rowbar into individual thin-film magnetic heads.
Claims13
A manufacturing method of a thin-film magnetic head, comprising the steps of:
- cutting a wafer on which a large number of thin-film magnetic head elements are formed into rowbars each of which has a plurality of aligned thin-film magnetic head elements;
- cleaning, by an ion beam etching method, a surface of each of the cut rowbars, which is to be opposed to a magnetic recording medium;
- depositing a protection film on the cleaned surface of the rowbar;
- and
- separating thereafter the rowbar into individual thin-film magnetic heads.
A thin-film magnetic head being fabricated by cutting a wafer on which a large number of thin-film magnetic head elements are formed into rowbars each of which has a plurality of aligned thin-film magnetic head elements, by cleaning, by an ion beam etching method, a surface of each of the cut rowbars, which is to be opposed to a magnetic recording medium, by depositing a protection film on the cleaned surface of the rowbar, and by separating thereafter the rowbar.
A head gimbal assembly, comprising:
- a thin-film magnetic head fabricated by cutting a wafer on which a large number of thin-film magnetic head elements are formed into rowbars each of which has a plurality of aligned thin-film magnetic head elements, by cleaning, by an ion beam etching method, a surface of each of the cut rowbars, which is to be opposed to a magnetic recording medium, by depositing a protection film on the cleaned surface of the rowbar, and by separating thereafter the rowbar;
- and
- a suspension for supporting the thin-film magnetic head.
A magnetic disk device, comprising:
- a magnetic recording medium for recording magnetic information;
- a head gimbal assembly provided with a thin-film magnetic head fabricated by cutting a wafer on which a large number of thin-film magnetic head elements are formed into rowbars each of which has a plurality of aligned thin-film magnetic head elements, by cleaning, by an ion beam etching method, a surface of each of the cut rowbars, which is to be opposed to a magnetic recording medium, by depositing a protection film on the cleaned surface of the rowbar, and by separating thereafter the rowbar, and a suspension for supporting the thin-film magnetic head;
- and
- means for moving the head gimbal assembly above the magnetic recording medium.
Dependencies are inferred from the claim text.