US 2005/0236754 A1Published application

Work carrier

AssigneeHorkos Corp.

InventorsShinsuke Sugata, Yasuhito Oohira, Toshihiko Amako

Life of this patent

Estimating the term…

Loading patent…

Abstract

A work carrier capable of moving a work stage 45 to an arbitrary position in the left/right direction and stopping the work stage 45 thereat with an accuracy equivalent to that of a conventional carrier or above through an inexpensive structure. The work carrier comprises a fixed guide rail member 15 and movable guide rail members 17, 18, 19 mounted on a supporting table 10, a driver 16 for moving the movable guide rail members to the left and the right, rail member interlocking mechanisms 35a, 35b for interlockingly operating the movable guide rail members 17, 18, 19, and the work stage 45 mounted on the movable guide rail member 19, wherein the driver 16 is a motor having a rotational speed being varied by inverter control and employing an open loop rotation control system, and a plurality of stopper members 52a, 52b, 52c are provided in order to stop the movable guide rail member 17 at a specified position.

Claims9

Dependent claims

A work carrier, comprising:

a fixed guide rail member for left and right provided on a support table;
at least more than two movable guide rail members accumulated on the fixed guide rail member;
a drive unit for displacing the lowest movable guide rail member in a left/right direction;
a rail member interlocking mechanism for operating so that an upper movable guide rail member may greatly jut to the left/right direction in connection with movement of the lowest movable guide rail member in the left/right direction;
and
a work stage moving in the left/right direction on the highest movable guide rail member in connection with its movement,
wherein the drive unit serves as a motor having a rotational speed being varied by inverter control and employing an open loop rotation control system, a plurality of stopper members are provided so as to impact each other to stop any of the movable guide rail members at positions corresponding to a carrier starting point and a carrier finishing point of the work stage, and the work stage is displaced to an arbitrary position between the carrier starting point and the carrier finishing point.

4 more elements

Dependencies are inferred from the claim text.