Growth of carbon nanotubes at low temperature
AssigneeApplied Materials, Inc.
InventorsBeom Park, Soo Choi, John White
Life of this patent
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Abstract
A method for depositing carbon nanotubes on a large substrate is provided. The carbon nanotubes are deposited on a plasma treated transition metal layer on a substrate. In one aspect, the transition metal layer is treated with a plasma of argon or a mixture of nitrogen and hydrogen. The carbon nanotubes are deposited by thermal chemical vapor deposition at a substrate temperature of between about 400° C. and about 450° C.
Claims21
A method of processing a substrate having a patterned transition metal layer comprising:
- plasma treating the patterned transition metal layer;
- and then
- depositing carbon nanotubes on the patterned transition metal layer at a substrate temperature of between about 400° C. and about 450° C.
A method of processing a substrate, comprising:
- depositing a transition metal layer on the substrate;
- plasma treating the transition metal layer with a plasma comprising argon or a mixture of nitrogen (N2) and hydrogen (H2);
- and
- depositing carbon nanotubes on the plasma treated transition metal layer at a substrate temperature of between about 400° C. and about 450° C.
A method of processing a substrate, comprising:
- depositing a transition metal layer on the substrate;
- patterning the transition metal layer;
- treating the transition metal layer with a plasma at an RF power of between about 1 kilowatt and about 2 kilowatt;
- and
- depositing carbon nanotubes on the plasma treated transition metal layer at a substrate temperature of between about 400° C. and about 450° C.
A process chamber comprising:
- a chamber body;
- a substrate support;
- an RF power source adapted to provide RF power to plasma treat a substrate on the substrate support;
- and
- a gas inlet manifold configured to introduce a mixture comprising a hydrocarbon into the chamber body, wherein the substrate support is adapted to heat the substrate thereon to a temperature of between about 400° C. and about 450° C. during deposition of carbon nanotubes on a patterned transition metal layer on the substrate.
Dependencies are inferred from the claim text.