Apparatus and methods for ferroelectric ram fatigue testing
AssigneeTexas Instruments Incorporated
InventorsJohn Rodriguez, Vijay Reddy
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Abstract
Apparatus are disclosed for fatigue testing ferroelectric material in a wafer, comprising an on-chip oscillator to provide a bipolar waveform to a ferroelectric capacitor formed in the wafer, as well as a switching system to selectively provide external access to the ferroelectric capacitor. Test methods are also disclosed, comprising measuring a performance characteristic of a ferroelectric capacitor in the wafer, providing a bipolar waveform to the ferroelectric capacitor for a number of cycles using an on-chip oscillator, and again measuring the performance characteristic after an integer number of cycles of the bipolar waveform.
Claims7
1-30. (canceled)
A method of fatigue testing ferroelectric material in a wafer, the method comprising:
- measuring at least one performance characteristic associated with a ferroelectric capacitor in the wafer;
- providing a bipolar waveform to the ferroelectric capacitor for an integer number of cycles using an oscillator fabricated in the wafer;
- and
- again measuring the at least one performance characteristic associated with the ferroelectric capacitor after the integer number of cycles.
Dependencies are inferred from the claim text.