Birefringence optical element and manufacturing method thereof
AssigneeKonica Minolta Holdings, Inc.
InventorsMitsuru Yokoyama, Naoki Nishida
Life of this patent
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Abstract
A mask with an opening pattern is placed on a substrate, and etching is carried out by use of anisotropy etching of crystal. The opening pattern of the mask is composed of broken lines, each of which is discontinued by discontinuing portions. By the etching, a birefringence optical element with a fine structure, in which trenches, each of which is discontinued by discontinuing portions, are juxtaposed periodically at a specified pitch, is obtained.
Claims20
A birefringence optical element comprising:
- a plurality of trenches which are juxtaposed periodically at a specified pitch so as to cause structured birefringence,
- wherein each of the trenches is broken into parts like a broken line by being discontinued by discontinuing portions.
A birefringence optical element comprising:
- a plurality of trenches which are juxtaposed periodically at a specified pitch so as to cause structured birefringence,
- wherein each of the trenches is broken into parts by being discontinued by at least one discontinuing portion.
A method for producing a birefringence optical element comprising a plurality of trenches which are juxtaposed periodically at a specified pitch so as to cause structured birefringence,
- wherein in an etching process of etching a substrate, a mask with an opening pattern for transfer of the trenches is placed on the substrate, the opening pattern of the mask being composed of broken lines, each of which is discontinued by discontinuing portions.
A method for producing a birefringence optical element comprising a plurality of trenches which are juxtaposed periodically at a specified pitch so as to cause structured birefringence,
- wherein in an etching process of etching a substrate, a mask with an opening pattern for transfer of the trenches is placed on the substrate, the opening pattern of the mask being composed of lines, each of which is discontinued by at least one discontinuing portion.
Dependencies are inferred from the claim text.