Fluid controller
AssigneesCkd Corporation, Fujikin Incorporated
InventorsGeorge Hoshi, Tsuneyuki Okabe, Kenichi Goshima, Hideo Kobayashi, Akinori Nagaya, Michio Yamaji, Kazuhiro Yoshikawa, Yuji Kawano
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AssigneesCkd Corporation, Fujikin Incorporated
InventorsGeorge Hoshi, Tsuneyuki Okabe, Kenichi Goshima, Hideo Kobayashi, Akinori Nagaya, Michio Yamaji, Kazuhiro Yoshikawa, Yuji Kawano
Estimating the term…
Each of lines A, B is provided on each of opposite sides thereof with a tape heater 11, and a space for positioning a tape heater holding clip 13 therein is provided in each of locations between adjacent fluid control devices. The tape heaters 11 are held from opposite sides thereof to the line by the clip 13. The lines A, B provided with the heaters are each mounted on a line support member 10 removably attached to a base member 1. The line support member 10 has a heater insertion bore 14 formed therein and extending longitudinally thereof. A sheath heater 12 is inserted into the bore 14.
A fluid control apparatus comprising a plurality of lines (A), (B) arranged in parallel on a base member (1) and having inlets, as well as outlets, facing toward the same direction, each of the lines (A), (B) comprising a plurality of fluid control devices (2), (3), (4), (5), (6), (7), (17), (18), (19) arranged in an upper stage and a plurality of block coupling members (8) arranged in a lower stage,
A fluid control apparatus comprising a plurality of lines (A), (B) arranged in parallel on a base member (1) and having inlets, as well as outlets, facing toward the same direction, each of the lines (A), (B) comprising a plurality of fluid control devices (2), (3), (4), (5), (6), (7), (17), (18), (19) arranged in an upper stage and a plurality of block coupling members (8) arranged in a lower stage,
Dependencies are inferred from the claim text.