Brush positioning device for a wafer cleaning station
OwnerMing-Chun Chou, Brian Peterseninventors
Life of this patent
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Abstract
A method, device, and system for positioning a brush of a wafer cleaning system. In the method, device, and system one or more light sources are positioned to generate one or more light beams across a plane. One or more light detectors are positioned to detect when the light beams are interrupted by the brush as it advances toward the plane.
Claims22
A device for positioning a brush of a wafer cleaning system, the device comprising:
- at least one light source positioned to generate at least one light beam across a plane;
- and
- at least one light detector positioned to detect the at least one light beam;
- wherein when the brush contacts the plane, the at least one light beam is interrupted by the brush.
A wafer cleaning system comprising:
- a wafer rotating mechanism;
- a brush;
- at least one light source positioned to generate at least one light beam across a plane;
- and
- at least one light detector positioned to detect the at least one light beam;
- wherein when the brush contacts the plane, the at least one light beam is interrupted by the brush.
A method of positioning a brush of a wafer cleaning system, the method comprising the steps of:
- generating a light beam across a plane;
- advancing the brush toward the plane;
- generating a first signal if the light beam is detected across the plane;
- generating a second signal if the light beam is not detected across the plane;
- and
- stopping the brush in response to the second signal.
A method of positioning a brush of a wafer cleaning system, the method comprising the steps of:
- generating a light beam across a plane;
- advancing the brush toward the plane;
- generating a first signal if the light beam is detected across the plane;
- generating a second signal if the light beam is not detected across the plane;
- stopping the brush in response to the second signal;
- and
- calculating a position of the brush from information associated with the stopping of the brush.
Dependencies are inferred from the claim text.