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US 2005/0229850 A1Published application
Rotary machine for cvd coatings
OwnerStephan Behle, Andreas Luttringhaus-Henkel +3inventors
InventorsStephan Behle, Andreas Luttringhaus-Henkel, Gregor Arnold, Matthias Bicker, Jurgen Klein
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Abstract
A method and apparatus are provided for allowing effective and fast CVD coating of workpieces. The invention provides a rotary apparatus for treatment, in particular CVD-coating, which includes a conveyor carousel, treatment stations, which are transported by the conveyor carousel, and at least one first pump device. The first pump device is transported by the conveyor carousel.
Claims38
A rotary apparatus for treating workpieces, comprising:
- a conveyor carousel;
- a plurality of treatment stations, wherein the plurality of treatment stations are transported by the conveyor carousel (3);
- and
- at least one first pump device, wherein the at least one first pump device is transported by the conveyor carousel.
1 more element
A process for the CVD coating of at least one workpiece in a rotary apparatus, comprising:
- introducing at least one workpiece into a treatment station on a rotating conveyor carousel;
- connecting the treatment station to at least one first pump device, wherein the at least one first pump device is conveyed with the conveyor carousel;
- evacuating the treatment station;
- and
- coating the at least one workpiece.
2 more elements
Dependencies are inferred from the claim text.