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US 2005/0229847 A1Published application
Method and device for in situ layer thickness determination
OwnerUlrich Bast, Roman Beyer +1inventors
InventorsUlrich Bast, Roman Beyer, Ralph Reiche
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Abstract
A method and device for layer thickness determination allows for the layer thickness to be determined in situ during the coating process. This is achieved using a sensor which has an electrical property which, as a result of the coating process, changes in a manner which is representative of the layer thickness which has been reached. As such, this property can be measured.
Claims7
A device for in situ layer thickness determination during a coating process, comprising:
- a sensor, adapted to be changed by the coating process in such a way that, as a result, an electrical property of the sensor which bears a correlation to the layer thickness is influenced;
- and
- means for measuring the change in the electrical property to determine the layer thickness.
Dependencies are inferred from the claim text.