Gas transmitter with selective gas permeable surfaces
AssigneeInficon GmbH
InventorDaniel Wetzig
Life of this patent
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Abstract
The invention relates to a gas transmitter (1) with selective gas permeable surfaces (4), comprising a support disc (3), provided with a number of through openings (2), made from a semiconductor material, a membrane (5), covering the openings (2) in the support disc (3) which forms the selective gas permeable surfaces (4) and means for controlling the temperature of the membrane (5). According to the invention, the temperature control means may be simplified whereby the support disc (3) itself serves as a means for controlling the temperature of the membrane (5).
Claims11
1-9. (canceled)
A gas transmitter with selective gas permeable surfaces comprising:
- a support disc having a plurality of through openings, said disc being made from a semiconductor material;
- a membrane covering the openings in the support disc, thereby forming selective gas permeable surfaces;
- and
- means for controlling the temperature of the membrane wherein the support disc itself serves as a means for controlling the temperature of the membrane.
A leakage gas detector in which at least one leakage gas is detected through a pressure rise, wherein said leakage gas detector is equipped with a gas transmitter with selective gas permeable surfaces, said gas transmitter comprising:
- a support disc having a plurality of through openings, said disc being made from a semiconductor material;
- a membrane covering the openings in the support disc, thereby forming selective gas permeable surfaces;
- and
- means for controlling the temperature of the membrane wherein the support disc itself serves as a means for controlling the temperature of the membrane.
A controllable calibrated leak in which the leakage rate is adjustable with the aid of a selectively permeable membrane, wherein said controllable calibrated leak is equipped with a gas transmitter with selective gas permeable surfaces, said gas transmitter comprising:
- a support disc having a plurality of through openings said disc being made from a semiconductor material;
- a membrane covering the openings in the support disc thereby forming selective gas permeable surfaces;
- and
- means for controlling the temperature of the membrane wherein the support disc itself serves as a means for controlling the temperature of the membrane.
Dependencies are inferred from the claim text.