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US 2005/0229705 A1Published application
Inertial sensor with a linear array of sensor elements
AssigneeAnalog Devices, Inc.
InventorJohn Geen
Life of this patent
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Abstract
An inertial sensor includes at least one pair of sensor elements arranged in a linear array. Each sensor element has a frame and a movable mass suspended within the frame. The frames of each pair of sensor elements may be coupled so that the frames are allowed to move in anti-phase to one another along parallel axes but are substantially prevented from moving in phase with one another.
Claims21
An inertial sensor comprising:
- at least one substrate;
- and
- at least two pairs of sensor elements configured in a linear array substantially in a plane above the at least one substrate, each pair of sensor elements including:
- a first sensor element having a first resonator suspended within a first frame;
- and
- a second sensor element having a second resonator suspended within a second frame, wherein:
- all of the frames are substantially aligned along a first axis in the plane and the frames of each pair are configured to move in anti-phase to one another along parallel axes in the plane normal to the first axis.
4 more elements
An inertial sensor comprising:
- at least one substrate;
- and
- at least two pairs of sensor elements configured in a linear array substantially in a plane above the at least one substrate, each pair of sensor elements including:
- a first sensor element having a first resonator suspended within a first frame;
- and
- a second sensor element having a second resonator suspended within a second frame, wherein:
- all of the frames are substantially aligned along a first axis in the plane, and wherein the inertial sensor further comprises means for operating the frames of each pair of sensor elements in anti-phase to one another along parallel axes in the plane normal to the first axis.
4 more elements
Dependencies are inferred from the claim text.