High-temperature gas sensors
AssigneeMassachusetts Institute of Technology
InventorsHarry Tuller, Huankiat Seh, Takeo Hyodo
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AssigneeMassachusetts Institute of Technology
InventorsHarry Tuller, Huankiat Seh, Takeo Hyodo
Estimating the term…
A method of sensing the amount of a gas in a fluid flow includes operating an acoustic wave (AW) sensor at a first resonant frequency. The AW sensor includes a high temperature stable piezoelectric plate coupled to a first gas-absorbing layer. Also included is combining a fluid flow having a gas component with the first gas-absorbing layer at a temperature of at least about 500° C. At least one resonant frequency of the AW sensor is sensed. The amount of gas in the fluid flow is sensed by correlating the resonant frequency with the amount of gas absorbed in the first gas-absorbing layer. A sensor for sensing the amount of a gas in a fluid flow includes a first gas-absorbing layer, a high-temperature-stable piezoelectric plate coupled to the first gas-absorbing layer, and a controller coupled to the high-temperature-stable piezoelectric plate. The controller is coupled to the high-temperature stable piezoelectric plate to measure a resonant frequency in the high temperature stable piezoelectric plate correlated with an amount of gas absorbed by the first gas absorbing layer, whereby the amount of a gas in a fluid flow is sensed. The high-temperature-stable piezoelectric plate is formed of at least one material selected from the group consisting of AlN, GaN, Al1-xGaxN (0≦x≦1), GaPO4, AlPO4, and materials having the crystal structure of Ca2Ga2Ge4SiO14, e.g., Ca2Ga2Ge4SiO14, La3Ga5SiO14, La3Ga5.5Nb0.5O14, La3Ga5.5Ta0.5O14, and the like.
A method of sensing the amount of a gas component in a fluid flow, comprising the steps of:
An acoustic wave (AW) sensor for sensing the amount of a gas in a fluid flow, comprising:
A method of sensing the amount of NOx in an exhaust stream from an internal combustion engine, comprising:
A method of reducing NOx to N2 in the exhaust stream of an internal combustion engine, comprising:
A method of sensing the amount of ammonia in an exhaust stream from an internal combustion engine, comprising:
An acoustic wave (AW) sensor for sensing the amount of a NOx component in an exhaust stream of an internal combustion engine, comprising:
A system for reducing NOx to N2 in the exhaust stream of an internal combustion engine, comprising:
An acoustic wave (AW) sensor for sensing the amount of an ammonia component in an exhaust stream of an internal combustion engine, comprising:
A method of sensing the amount of a gas component in a fluid flow, comprising the steps of:
An acoustic wave (AW) sensor for sensing the amount of a gas in a fluid flow, comprising:
A method of sensing the amount of a gas component in a fluid flow, comprising the steps of:
An acoustic wave (AW) sensor for sensing the amount of a gas in a fluid flow, comprising:
Dependencies are inferred from the claim text.