Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods

A method for varying the capacitance of two conductive plates, the method comprising:

• (a) providing a micro-electro-mechanical system (MEMS) variable capacitor comprising:
• (i) a movable component being movable with respect to a substrate and comprising a first and second portion, wherein the first portion is positioned further from the substrate than the second portion;
• (ii) first and second actuation electrodes being spaced apart, wherein the first actuation electrode is attached to the first portion of the movable component, wherein the second actuation electrode is attached to the substrate, and wherein the first actuation electrode is movable with respect to the second actuation electrode when a voltage is applied across the first and second actuation electrodes;
• (iii) a first capacitive electrode attached to the second actuation electrode;
• and
• (iv) a second capacitive electrode attached to the second portion of the movable component and spaced from the first capacitive electrode for movement of the first capacitive electrode with respect to the second capacitive electrode upon application of voltage across the first and second actuation electrodes to change the capacitance between the first and second capacitive electrodes;
• and
• (b) applying a voltage across the first and second actuation electrodes.

A method for varying the capacitance of two conductive plates, the method comprising:

• (a) providing a micro-electro-mechanical system (MEMS) variable capacitor comprising:
• (i) first and second actuation electrodes being spaced apart, wherein the first actuation electrode is movable with respect to the second actuation electrode when a voltage is applied across the first and second actuation electrodes;
• (ii) a first capacitive electrode attached to the first actuation electrode;
• and
• (iii) a second capacitive electrode attached to the second actuation electrode and spaced from the first capacitive electrode for movement of the first capacitive electrode with respect to the second capacitive electrode upon application of voltage across the first and second actuation electrodes to change the capacitance between the first and second capacitive electrodes, wherein the capacitive electrodes are spaced closer to one another than the actuation electrodes;
• and
• (b) applying a voltage across the first and second actuation electrodes.

A method for varying the capacitance of two conductive plates, the method comprising:

• (a) providing a micro-electro-mechanical system (MEMS) variable capacitor comprising:
• (i) first and second actuation electrodes being spaced apart, and the first actuation electrode being movable with respect to the second actuation electrode when a voltage is applied across the first and second actuation electrodes;
• (ii) a first capacitive electrode attached to and at least partially mechanically decoupled from the first actuation electrode in a rotational direction;
• and
• (iii) a second capacitive electrode attached to the second actuation electrode and spaced from the first capacitive electrode for movement of the first capacitive electrode in a substantially straight direction with respect to the other capacitive electrode upon application of voltage across the first and second actuation electrodes to change the capacitance between the first and second capacitive electrodes;
• and
• (b) applying a voltage across the first and second actuation electrodes.

A method for varying the capacitance of two conductive plates, the method comprising:

• (a) providing a micro-electro-mechanical system (MEMS) variable capacitor comprising:
• (i) first and second actuation electrodes being spaced apart, and at least one of the actuation electrodes being movable when a voltage is applied across the first and second actuation electrodes;
• (ii) a first capacitive electrode attached to and electrically isolated from the first actuation electrode;
• (iii) a second capacitive electrode attached to the second actuation electrode and spaced from the first capacitive electrode for movement of at least one of the capacitive electrodes with respect to the other capacitive electrode upon application of voltage across the first and second actuation electrodes to change the capacitance between the first and second capacitive electrodes;
• and
• (iv) first and second torsional beams for providing resistance to movement of the first and second capacitive electrodes with respect to one another, wherein each torsional beams include a first and second end, wherein the torsional beams are fixed to one another at the first end, and wherein the torsional beams extend in a substantially opposing directions to the second end and are attached to the second capacitive electrode;
• and
• (b) applying a voltage across the first and second actuation electrodes for moving the capacitive electrodes with respect to one another.