Methods for fabrication of a polishing article
AssigneeApplied Materials, Inc.
InventorsStan Tsai, Ralph Waldensweiler, Yongqi Hu, Liang-Yuh Chen, Donald Olgado
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Abstract
Methods are provided for forming a conductor for use in electrochemical mechanical polishing. In one aspect a method is provided for processing a substrate including providing a substrate having a conductive surface, depositing a resist material on the conductive surface, patterning the resist layer to expose portions of the conductive surface, and depositing a metal layer on the exposed portions of the conductive surface by an electrochemical deposition technique.
Claims20
A method for processing a polishing article, comprising:
- providing a substrate having a conductive base structure comprising one or more fibers coated with a conductive material;
- depositing a mask material on the conductive base structure;
- patterning the mask layer to expose portions of the conductive base structure;
- and
- depositing a metal layer on the exposed portions of the conductive base structure by an electrochemical deposition technique.
A polishing article for processing a substrate, comprising:
- a base structure including at least a fabric layer;
- and
- a plurality of conductive contacts disposed on the fabric layer and adapted to polish a substrate.
A method for processing a polishing article, comprising:
- providing a substrate having a conductive base structure comprising one or more fibers coated with a conductive material;
- depositing a pattern template on the conductive base structure, wherein the patterned template is adapted to expose portions of the conductive base structure;
- and
- depositing a metal layer on the exposed portions of the conductive base structure by an electrochemical deposition technique.
Dependencies are inferred from the claim text.