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US 2005/0165731 A1Published application
Method for processing data based on the data context
AssigneeTokyo Electron Limited
InventorMerritt Funk
Life of this patent
Estimating the term…
Abstract
A method for managing data in a semiconductor processing environment. Raw data is collected during a process. Also, trace file data and process log file data are received. The raw data is synchronized with the trace file data and process log file data to create wafer data summary data is calculated from the raw data and a file is created containing the wafer data and the summary data.
Claims29
A method for managing data in a semiconductor processing environment, the method comprising:
- collecting raw data during a process;
- receiving trace file data and process log file data;
- synchronizing the raw data with the trace file data and process log file data to create wafer data;
- calculating summary data from the raw data;
- and
- creating a file containing the wafer data and the summary data.
3 more elements
Dependencies are inferred from the claim text.