Method for coating a support with a material
AssigneeEppra
InventorPeter Choi
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Abstract
The invention concerns a method for coating a support (10) comprising a first material with a coating layer comprising a second material, including at least a phase (A, A′) for deposition of a layer of given thickness of coherent material (11, 13) on the support surface during which the interaction between an ion source and a plasma is used. The invention is characterized in that each phase (A, A′) of material deposition is followed by a phase (B, B′) for exposure of the support and the deposited layer of material (11, 13) to a pulse of limited duration of an ionic bombardment with high energy density of selected energy density level.
Claims11
A method for coating a support, comprising a first material, with a coating layer comprising a second material, including at least one material deposition phase for depositing a layer of given thickness of coherent material on the surface of the support during which interaction between an ion source and a plasma is used, characterized in that each material deposition phase is followed by a phase of exposure of the support and the deposited layer of material to a pulse of high energy density ion bombardment for a limited duration at a chosen energy density level.
Dependencies are inferred from the claim text.