Removal of sulfur-containing impurities from volatile metal hydrides

A system for the the purification of a volatile metal hydride feed comprising

• (a) a first vessel containing an alkaline material, wherein the vessel is adapted for contacting the volatile metal hydride feed with the alkaline material, the feed containing one or more acidic impurities, one of which is a sulfur-containing impurity, wherein at least a portion of the sulfur-containing impurity is reacted with the alkaline material to remove the portion of the sulfur-containing impurity from the feed and provide an intermediate purified material;
• and
• (b) a second vessel containing an adsorbent material, wherein the vessel is adapted for contacting the intermediate purified product with the adsorbent material to remove at least a portion of the sulfur-containing impurity from the intermediate purified material and provide a purified volatile metal hydride product.