Intelligent data multiplexer
AssigneeApplied Materials, Inc.
InventorAlexey Goder
Life of this patent
Estimating the term…
Abstract
An Intelligent Data Multiplexer (“IDM”) can be used to interface a plurality of host computers with a semiconductor manufacturing tool. In one embodiment, the IDM has a plurality of host-side ports configured to receive messages from each of the host computers interfaced with the semiconductor manufacturing tool. The IDM also includes a multiplexer configured to multiplex the messages received from the host-side ports. To process possible conflict messages from the host computers, the IDM has a conflict resolve module. The messages are then delivered from the IDM to the semiconductor manufacturing tool through a tool-side port used to connect the semiconductor manufacturing tool to the IDM.
Claims26
An intelligent data multiplexer (“IDM”) to interface a plurality of host computers with a semiconductor manufacturing tool, the IDM comprising:
- a plurality of host-side ports configured to receive messages from each host computer;
- a multiplexer configured to multiplex the messages received from the host-side ports;
- a conflict resolve module configured to process conflict messages from the multiplexed messages;
- and
- a tool-side port configured to deliver the messages to the semiconductor manufacturing tool.
A semiconductor manufacturing system comprising:
- a semiconductor manufacturing tool;
- a first host computer and a second host computer;
- a server having resident thereon an intelligent data multiplexer (“IDM”) to interface the first and second host computers with the semiconductor manufacturing tool.
A method performed by a conflict resolve module of an intelligent data multiplexer, the method comprising:
- receiving a request message from a host computer through a port associated with the host computer, the message including a message identifier;
- mapping the message identifier and the port to a unique virtual identifier;
- and
- generating an altered message by replacing the message identifier with the virtual identifier.
A method performed by a message cache module of an intelligent data multiplexer, the method comprising:
- receiving a request message from a host computer, the request message being a request for data from a semiconductor manufacturing tool;
- determining whether the data has already been requested by another host computer and cached;
- if that data has been cached, retrieving the cached data;
- generating a reply message using the cached data;
- and
- delivering the reply message to the host computer.
Dependencies are inferred from the claim text.