Process yield learning
AssigneeLSI Logic Corporation
InventorsJeffrey Hanson, Ryan Fredrickson
Life of this patent
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Abstract
A method for producing yield enhancement data from integrated circuits on a substrate. A database of defects on the substrate is compared to a database of design information for the integrated circuits. The defects on the substrate are associated with classes of design information to produce the yield enhancement data.
Claims20
A method for producing yield enhancement data for integrated circuits on a substrate, the method comprising the steps of:
- comparing a database of defects on the substrate to a database of design information for the integrated circuits, and
- associating the defects on the substrate with classes of design information to produce the yield enhancement data.
A method for producing yield enhancement data from integrated circuits on a substrate, the method comprising the steps of:
- creating a database of design information for the integrated circuits, which design information is used as a template for fabricating the integrated circuits,
- creating a database of defects on the substrate during processing of the integrated circuits,
- comparing the database of design information with the database of defects to create associations between the design information and the defects, and
- associating the database of defects with the database of design information by physical proximity of the defects to classes of the design information to produce the yield enhancement data.
A computerized system for analyzing defects, the system comprising:
- means for receiving design information for integrated circuits, where the integrated circuits are fabricated on a substrate based on the design information,
- means for receiving defect information for integrated circuits, where the defect information contains locations of defects on the substrate,
- means for comparing the design information with the defect information, and
- means for associating the defects with classes of the design information based on physical proximity on the substrate to produce yield enhancement data.
Dependencies are inferred from the claim text.