Method for fabricating nanometer-scale structure
AssigneeSII NanoTechnology Inc.
InventorsMasatoshi Yasutake, Takashi Kaito, Yoshiharu Shirakawabe, Itaru Kitajima
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Abstract
In a method for fabricating a nanometer-scale structure by arranging nanotubes in a predetermined direction at a predetermined position, the method for fabricating a nanometer-scale structure comprises a first step of planarizing a substrate by etching a predetermined part by irradiating a focused energy beam to the sample, a second step of decomposing and depositing an organic gas into a columnar structure with an objective of determining the position and direction, and a third step of attaching and fixing the nanotube by using the thus deposited columnar structure as a standard of position and direction.
Claims26
In a method for fabricating a nanometer-scale structure by arranging nanotubes in a predetermined direction at a predetermined position, the method for fabricating a nanometer-scale structure comprises a first step of planarizing a substrate by etching a predetermined part of the sample by irradiating a focused energy beam thereto, a second step of decomposing and depositing an organic gas into a columnar structure with an objective of determining the position and direction, and a third step of attaching and fixing the nanotube by using the thus deposited columnar structure as a standard of position and direction.
A method for fabricating a nanometer-scale structure, comprising a first step of planarizing the substrate by arranging nanotubes in a predetermined direction at a predetermined position and irradiating focused energy beam to the sample with an objective of fabricating a nanometer-scale structure by etching the predetermined part and the surroundings thereof, a second step of decomposing and depositing an organic gas into a columnar structure with an objective of determining the position and direction, a third step of attaching and fixing the nanotube by using the thus deposited columnar structure (pillar) as a standard of position and direction, and a fourth step of imparting electrical conductivity to the attached nanotube between an electrode.
Dependencies are inferred from the claim text.