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AssigneeHitachi, Ltd.
InventorsShuichi Kanno, Akio Honji, Hisao Yamashita, Shigeru Azuhata, Shin Tamata, Kazuyoshi Irie
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Fluorine compounds such as C2F6, CF4, CHF3, SF6 and NF3, are made in contact with a fluorine compound decomposition catalyst and a catalyst the decomposition oft least one of CO, SO2F2 and N2O in the presence of water or in the presence of water and oxygen. The catalyst the decomposition oft least one of CO, SO2F2 and N2O preferably contains at least one selected from Pd, Pt, Cu, Mn, Fe, Co, Rh, Ir and Au in the form of a metal or an oxide. According to the invention, the fluorine compound can be converted to HF, which is liable to be absorbed by water or an alkaline aqueous solution, and a substance, such as CO, SO2F2 and N2O, formed by decomposition of the fluorine compound can also be decomposed.
The decomposition of fluorine compounds over a catalyst comprising a step of contacting said fluorine compounds, in the presence of water vapor, oxygen and an inert gas as a dilutent gas, with a fluorine compounds decomposition catalyst and a catalyst for the decomposition SO2F2 to decompose said fluorine compounds.
A process for the decomposition of fluorine compounds over a catalyst comprising steps of decomposing said fluorine compounds by contacting a fluorine compounds decomposition catalyst in the presence of water vapor and an inert gas as a dilutent gas;
A process for the decomposition of fluorine compounds comprising a step of the decomposition and removing SO2F2 from a gas containing SO2F2, said step comprising a step of contacting said gas containing SO2F2 over a catalyst for decomposition of SO2F2 in the presence of water vapor and oxygen.
12-18. (canceled)
Dependencies are inferred from the claim text.