Semiconductor device including a capacitance
AssigneeRenesas Technology Corp.
InventorsShigenobu Maeda, Takashi Ipposhi, Yuuichi Hirano
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AssigneeRenesas Technology Corp.
InventorsShigenobu Maeda, Takashi Ipposhi, Yuuichi Hirano
Estimating the term…
It is an object to obtain a semiconductor device including a capacitance having a great Q-value. In an SOI substrate comprising a support substrate (165), a buried oxide film (166) and an SOI layer (171), an isolating oxide film 167 (167a to 167c) is selectively formed in an upper layer portion of the SOI layer (171) with a part of the SOI layer (171) remaining as a P− well region (169). Consequently, an isolation (partial isolation) structure is obtained. An N+ diffusion region (168) is formed in the SOI layer (171) between the isolating oxide films (167a) and (167b) and a P+ diffusion region (170) is formed in the SOI layer (171) between the isolating oxide films (167b) and (167c). Consequently, there is obtained a junction type variable capacitance (C23) having a PN junction surface of the P− well region (169) provided under the isolating oxide film (167b) and the N+ diffusion region (168).
1-11. (canceled)
A semiconductor device having a junction capacitance formed in an SOI layer of an SOI substrate constituted by a substrate, at least a surface of which is insulative, and said SOI layer of a first conductivity type provided on said surface of said substrate,
A semiconductor device having a junction capacitance formed in an SOI layer of an SOI substrate constituted by a substrate, at least a surface of which is insulative, and said SOI layer of a first conductivity type provided on said surface of said substrate,
16-18. (canceled)
Dependencies are inferred from the claim text.