Inspection by a transmission electron microscope of a sample
AssigneeSamsung Electronics Co., Ltd.
InventorsMyoung-Rack Lee, Sun-Young Lee
Life of this patent
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Abstract
A method of manufacturing a transmission electron microscope inspection sample. The sample is mounted into a recess in the mount and the sample is grinded to a preset target thickness. A recess for mounting the sample and a groove for separating the sample from the recess are formed on a top surface of the mount. The sample is fixed into the recess using mounting wax. The protruding portion of the sample protrudes above the mount and is grinded by the grinder. The depth of the recess is based on the target thickness of the sample. The protruding portion of the sample is grinded to the top surface of the mount.
Claims19
A grinding mount for receiving a transmission electron microscope (TEM) inspection sample to be grinded, the sample having a given thickness and a given outer profile, comprising:
- a rigid body having a principle surface;
- a recess defined in the principle surface of the rigid body, wherein a horizontal profile of the recess corresponds to the given outer profile of the sample and wherein a vertical depth of the recess is less than the given thickness of the sample;
- and
- a groove defined in the principle surface of the rigid body, wherein the groove partially overlaps the recess and wherein a vertical depth of the groove is greater than the vertical depth of the recess.
A method of treating a transmission electron microscope inspection sample, comprising:
- mounting the sample to a recess in a mount, wherein the shape of the recess corresponds to the shape of the sample;
- grinding a protruding portion of the sample which protrudes from the mount;
- and
- separating the sample from the mount.
Dependencies are inferred from the claim text.