Spectral measurnig device

A spectrometering apparatus comprising:

• a chamber that is evacuated to achieve a vacuum state and includes a light transmission window;
• a generator that generates terahertz pulse light;
• an illumination optical system that guides the terahertz pulse light onto a specimen;
• a detector that detects specimen light from the specimen;
• and
• a detection optical system that guides the specimen light from the specimen irradiated with the terahertz pulse light to the detector, wherein:
• the generator, the illumination optical system, the detector and the detection optical system are disposed inside the evacuated chamber;
• and
• the specimen is placed outside the evacuated chamber.

A spectrometering apparatus comprising:

• a chamber that has a light transmission window and is purged with gas which does not absorb terahertz pulse light;
• a generator that generates terahertz pulse light;
• an illumination optical system that guides the terahertz pulse light onto a specimen;
• a detector that detects specimen light from the specimen;
• and
• a detection optical system that guides the specimen light from the specimen irradiated with the terahertz pulse light to the detector, wherein:
• the generator, the illumination optical system, the detector and the detection optical system are disposed inside the chamber;
• and
• the specimen is placed outside the chamber.

A spectrometering apparatus comprising:

• a first vacuum chamber and a second vacuum chamber separated from each other by a barrier wall having a light transmission window;
• a holder disposed in the first vacuum chamber, which holds a specimen;
• a light radiation unit disposed inside the second vacuum chamber, which guides measuring light onto the specimen in the first vacuum chamber via the light transmission window;
• a light detection unit disposed in the second vacuum chamber, which receives specimen light from the specimen irradiated with the measuring light via the light transmission window;
• a base disposed in the second vacuum chamber, to which the light radiation unit and the light detection units are fixed;
• and
• a connecting member that displaceably passes through barrier wall with airtight sealing and connects the base and the holder so as to fix positions thereof relative to each other.