Abrasive electrolyte
OwnerMichael Berman, Steven Rederinventors
Life of this patent
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Abstract
An abrasive electrolyte solution adapted for thinning a layer on a substrate without contaminating the substrate. The abrasive electrolyte solution includes an electrically conductive fluid that is substantially free of materials that are reactive within a desired operating voltage potential range, and substantially free of materials that inhibit desired reactions within the desired operating voltage potential range. Also included are abrasive particles that have a size that is small enough for the particles to substantially remain in suspension in the electrically conductive fluid, and large enough for the particles to provide a desired degree of erosion of the layer on the substrate when the abrasive electrolyte solution is forced against the layer on the substrate.
Claims20
An abrasive electrolyte solution adapted for thinning a layer on a substrate without contaminating the substrate, the abrasive electrolyte solution comprising:
- an electrically conductive fluid that is substantially free of materials that are reactive within a desired operating voltage potential range and substantially free of materials that inhibit desired reactions within the desired operating voltage potential range, and
- abrasive particles having a size that is small enough for the particles to substantially remain in suspension in the electrically conductive fluid and is large enough for the particles to provide a desired degree of erosion of the layer on the substrate when the abrasive electrolyte solution is forced against the layer on the substrate.
An abrasive electrolyte solution adapted for thinning an electrically conductive layer on a semiconducting substrate including integrated circuits, without contaminating the substrate, the abrasive electrolyte solution comprising:
- an electrically conductive fluid that is substantially free of materials that are reactive within a desired operating voltage potential range and substantially free of materials that inhibit desired reactions within the desired operating voltage potential range, and
- abrasive particles having a size that is small enough for the particles to substantially remain in suspension in the electrically conductive fluid and is large enough for the particles to provide a desired degree of erosion of the layer on the substrate when the abrasive electrolyte solution is forced against the layer on the substrate.
A method for thinning a layer on a substrate, the method comprising the step of forcing an abrasive electrolyte solution against the layer on the substrate while applying a voltage potential through the abrasive electrolyte solution between the substrate and a second electrode, where the layer is thinned both physically by the abrasive electrolyte solution and electrolytically by the voltage potential applied through the abrasive electrolyte solution.
Dependencies are inferred from the claim text.