Method of fabricating display device
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsRitsuko Nagao, Satoshi Murakami, Misako Nakazawa
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Abstract
The present invention improves the reliability of wirings, facilitates the orientation control of liquid crystal, or improves a reflectance of a reflective liquid crystal display device. In the case where a plurality of levelling films are laminated, a first levelling film is formed to have a thickness smaller than that of a second levelling film, thereby realizing a higher levelling rate. Therefore, unevenness of the surface due to level differences is reduced and it becomes possible to attain the above objects.
Claims85
1-7. (Canceled).
A display device comprising:
- a semiconductor film over a substrate;
- an interlayer insulating film over the semiconductor film;
- a wiring on the interlayer insulating film connecting to the semiconductor film through a hole in the interlayer insulating film;
- a passivation film over the wiring;
- a leveling film containing a siloxane structure on the passivation film;
- and
- a pixel electrode over the leveling film.
A display device comprising:
- a semiconductor film over a substrate;
- an interlayer insulating film over the semiconductor film;
- a wiring on the interlayer insulating film connecting to the semiconductor film through a hole in the interlayer insulating film;
- an insulating film over the wiring;
- a leveling film containing a siloxane structure on the insulating film;
- and
- a pixel electrode over the leveling film.
A display device comprising:
- a semiconductor film over a substrate;
- an interlayer insulating film over the semiconductor film;
- a wiring on the interlayer insulating film connecting to the semiconductor film through a hole in the interlayer insulating film;
- a passivation film over the wiring;
- a leveling film formed by a spin coating method on the passivation film;
- and
- a pixel electrode over the leveling film.
A display device comprising:
- a semiconductor film over a substrate;
- an interlayer insulating film over the semiconductor film;
- a wiring on the interlayer insulating film connecting to the semiconductor film through a hole in the interlayer insulating film;
- an insulating film over the wiring;
- a leveling film formed by a spin coating method on the insulating film;
- and
- a pixel electrode over the leveling film.
A display device comprising:
- a semiconductor film over a substrate;
- an interlayer insulating film over the semiconductor film;
- a wiring on the interlayer insulating film connecting to the semiconductor film through a hole in the interlayer insulating film;
- a passivation film over the wiring;
- a leveling film containing a siloxane structure on the passivation film;
- a pixel electrode over the leveling film;
- and
- an electro luminescence layer over the pixel electrode.
A display device comprising:
- a semiconductor film over a substrate;
- an interlayer insulating film over the semiconductor film;
- a wiring on the interlayer insulating film connecting to the semiconductor film through a hole in the interlayer insulating film;
- an insulating film over the wiring;
- a leveling film containing a siloxane structure on the insulating film;
- a pixel electrode over the leveling film;
- and
- an electro luminescence layer over the pixel electrode.
A display device comprising:
- a semiconductor film over a substrate;
- an interlayer insulating film over the semiconductor film;
- a wiring on the interlayer insulating film connecting to the semiconductor film through a hole in the interlayer insulating film;
- a passivation film over the wiring;
- a leveling film formed by a spin coating method on the passivation film;
- a pixel electrode over the leveling film;
- and
- an electro luminescence layer over the pixel electrode.
A display device comprising:
- a semiconductor film over a substrate;
- an interlayer insulating film over the semiconductor film;
- a wiring on the interlayer insulating film connecting to the semiconductor film through a hole in the interlayer insulating film;
- an insulating film over the wiring;
- a leveling film formed by a spin coating method on the insulating film;
- a pixel electrode over the leveling film;
- and
- an electro luminescence layer over the pixel electrode.
Dependencies are inferred from the claim text.